I checked a projector focusing on the vat again, the result of printing would be very good. Only one place, a support wasn't generated. So there part was incomplete, but almost good shape in terms of accuracy.
I think a cause of the failure, there is a subtle difference in the angle between the surface of PDMS(bottom of vat) and build plate. The thickness of the basement on this side is thinner than the other side. The basement on this was peeled off at the first process, so the support parts weren't generate. I have to recheck the degree of adhesion between the PDMS and plate.